What is MEMS?
MEMS stands for Micro-Electro-Mechanical System. It is the integration of mechanical elements, actuators, sensors, and electronics on a common silicon substrate through microfabrication technology.
The electronics part of MEMS are fabricated using integrated circuit (IC) process sequences. The micromechanical part of MEMS are fabricated using compatible micromachining processes that selectively etch away parts of the silicon wafer.
MEMS revolutionizes every product from every product category. MEMS is a technology allowing development of smart products that are cheaper. Are you familiar with Wii? The sensor used by Wii is a MEMS technology.
I will discuss more on MEMS in my succeeding posts. Stay tuned.
Below are some images of sensor structures of some MEMS devices.
Big Gears? I don't thing so. Those microgears are made of silicon.
This is an example of resonator fingers. But we can call it as "Moving Beams" to simplify.
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